半导体 (Semiconductor)
解决方案与软件
Fab Environmental Solutions
Applied Materials is committed to designing products that optimize performance while reducing waste, conserving natural resources and using energy in a responsible way. In keeping with this philosophy, we offer subfab solutions to maximize efficiency, lower costs and contribute to a cleaner, greener world.
Our unique control system and pre-pump abatement technology reduce environmental impact and meet EPA reporting regulations for greenhouse gas emissions.
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iSystem™ Controller
While monitoring tool operation, the Applied iSystem controller collects valuable data that can be used to generate resource consumption reports and greenhouse gas emissions reports among other environmental factors. Each small footprint iSystem controller is capable of supporting up to four tools and is easily installed on both Applied and non-Applied Materials 200mm and 300mm process tools. With more than 3000 tool connections currently installed, manufacturers have reported rapid ROI after using the iSystem controller.
