Evaporation system based on induction heated crucibles
The TopCoil platform complements Applied Materials’ evaporation portfolio with induction heated crucible technology. This is a solution for applications demanding low defect performance and also enables the deposition of a wide range of materials.
- TopCoil enables a wide range of applications beyond traditional (food) packaging by induction heated crucibles
- Virtually pinhole-free without significant compromise on web speed combined with improved layer uniformity
- TopCoil enables the deposition of a wide variety of metals and metal-oxide including: Al, Zn, Ag, Cu, Cr, ZnS and Oxides
- Innovative inductor design allows closer proximity of sources to each other with reduced interference
- Stable process at speeds up to 14m/sec