SAQP

Eases Litho Resolution

SAQP

Eases Litho Resolution

SAQP effectively decreases the lithography resolution by 4x using a spacer-based patterning approach with one lithography step and two spacer depositions. 

It is critical for unidimensional design rules and will be used in semiconductor processes at the 10nm node and beyond.

 

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SAQP video 1280 x 720

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