E-Beam Review

Modern high resolution OLED and LCD display manufacturing requires greater emphasis on defect reduction and process control. Applied Materials’ world first inline Electron Beam Review (EBR) system integrates semiconductor scanning electron microscopy (SEM) with AKT's large-scale vacuum platform.

Auto process inspection (API) and critical dimensions (CDs) measurement enable customers’ most challenging process control spec. Features a precision stage, auto defects review (ADR) module registers the defects based on AOI coordinates and determines root cause of killer defects aided with EDX. Bringing semiconductor yield methods of inline SEM enables high yielding reliable flexible OLED displays and accelerates the world’s largest substrate LCD yield ramp.