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Using mixed-fluid jet bombardment for advanced particle removal, SST Article by: Steven Verhaverbeke, Roman Gouk, Erica Porras, Alexander Ko, Rick Endo, Solid State Technology, March, 2006†
Using multiple transducers at sub-65nm for single-wafer megasonics-based cleaning, John J. Rosato, M. Rao Yalamanchili, Solid State Technology, October, 2005†
† You will be leaving the Applied Materials Web site. The content of the third party Web site is not controlled by Applied Materials and this link is provided solely for your convenience. |
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